Laboratory is focused on preparation of new structures by litographic methods like optical and electron beam litography, preparation and characterization of thin films of progressive materials that could also act as the precursors in preparation process of nanostructures. It also includes an Atomic Force Microscope both for research of surface physical properties (topography on nanometer scale) and for preparation of the nanostructures (local anodic oxidation). The laboratory is localized in semi-clean room.

Research scientists: Vladimír Komanický (head UPJŠ), Tomáš Samuely (UPJŠ)

Sputtering system	Sputtering system
Scanning electron microscope	Atomic force microscope
Atomic force microscope	Atomic force microscope
Optical litography	Plasma etching system
Spin coater	Wire bonder
Ultra-pure water system	Furnace
Ventilation system